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Damage-free surface treatment of carbon nanotubes and self-assembled monolayer devices using a neutral beam process for fusing top–down and bottom–up processes, Samukawa, Seiji, Ishikawa, Yasushi, Okumura, Keiji, Sato, Yoshinori, Tohji, Kazuyuki, Ishida, Takao
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Samukawa et al. (2008) studied this question.
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