Serious n-channel transistor hot-carrier lifetime degradation due to plasma-charging damage during PETEOS deposition is reported for the first time. Contrary to conventional wisdom, a dielectric film thickness dependent damage is observed. A new mechanism for charging-damage during plasma deposition of dielectric is proposed. This new mechanism uses photoconduction to explain why the antennae continue to charge up after a layer of dielectric is deposited on top. Some numerical estimation is provided.
No takes yet. Share an insight, caveat, or question.
Cheung et al. (1995) studied this question.
Synapse has enriched 4 closely related papers on similar clinical questions. Consider them for comparative context: