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May 1, 2001Plasma Sources Science and Technology

Electron energy distribution functions and the influence on fluorocarbon plasma chemistry

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Authors

HSH. SugaiUniversity of FukuiIGI. GhanashevNagoya UniversityMHM. HosokawaITER

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Sugai et al. (2001) studied this question.

synapsesocial.com/papers/6a8931d09f05dd9930a2c4fdhttps://doi.org/10.1088/0963-0252/10/2/327
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