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September 1, 1999Japanese Journal of Applied Physics

Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas

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Authors

HKH. KokuraSamsung (South Korea)KNKeiji NakamuraKyushu UniversityIGI. Ghanashev

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Kokura et al. (1999) studied this question.

synapsesocial.com/papers/6aa93fab8e04063aed2559b2https://doi.org/10.1143/jjap.38.5262
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