Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
November 1, 1991Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Control of ion energy and flux in a dual radio frequency excitation magnetron sputtering discharge

View Full Paper
Ask AI
Bookmark
Share

Authors

HLHans-Dirk LöweTohoku UniversityHGH. GotôNTT Basic Research LaboratoriesTOTadahiro OhmiTohoku Institute of Technology

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

Löwe et al. (1991) studied this question.

synapsesocial.com/papers/6a8932cea90c2f4c44fb8ab8https://doi.org/10.1116/1.577178
View Full Paper
Ask AI
Bookmark
Share