Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
February 23, 2004Physical Review E

Numerical investigation of ion-energy-distribution functions in single and dual frequency capacitively coupled plasma reactors

View Full Paper
Ask AI
Bookmark
Share

Authors

VGVioleta GeorgievaImec the NetherlandsABAnnemie BogaertsTokyo Institute of TechnologyRGR. GijbelsUniversity of Antwerp

Discussion

Loading...

Member takes

Overview

Key Points

Key points are not available for this paper at this time.

Cite This Study

Georgieva et al. (2004) studied this question.

synapsesocial.com/papers/6a8932d8b6153083a5deee48https://doi.org/10.1103/physreve.69.026406
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Particle-in-cell/Monte Carlo simulation of a capacitively coupled radio frequency Ar/CF4 discharge: Effect of gas composition2003 · 94 citations
  2. 2Anomalies of the Energy of Positive Ions Extracted from High-Frequency Ion Sources. A Theoretical Study1968 · 139 citations
  3. 3Prediction of Ion Energy and Angular Distributions in Single and Dual Frequency Plasmas1994 · 15 citations
  4. 4Independent control of ion density and ion bombardment energy in a dual RF excitation plasma1993 · 100 citations
  5. 5Electron Impact Cross Section Data for Carbon Tetrafluoride1994 · 127 citations