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February 1, 2004IEEE Transactions on Plasma Science

Simulation of Capacitively Coupled Single- and Dual-Frequency RF Discharges

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Authors

JLJ.K. LeePohang University of Science and TechnologyNBNatalia Yu. BabaevaJoint Institute for High TemperaturesHKH.C. KimPohang University of Science and Technology

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Lee et al. (2004) studied this question.

synapsesocial.com/papers/6a8932d8b6153083a5deee49https://doi.org/10.1109/tps.2004.823975
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