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Angular and angle-resolved energy distributions of neutral atoms sputtered from elemental targets under ion bombardment are investigated by numerical and analytic modeling. Special emphasis is made on sub-keV ion bombardment, which is typical for sputter deposition sources. Scaling laws that define the distribution anisotropies are formulated. An approximate semiempirical description is suggested for anisotropic energy distributions.
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Stepanova et al. (2001) studied this question.
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