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May 1, 2005Plasma Sources Science and TechnologyOpen Access

Numerical investigation of dual frequency capacitively coupled hydrogen plasmas

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Authors

ASA. SalabasSMA Solar Technology (Germany)RBRalf Peter BrinkmannMedizinisches Laserzentrum Lübeck (Germany)

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Salabas et al. (2005) studied this question.

synapsesocial.com/papers/6a89355275060194fdc975ddhttps://doi.org/10.1088/0963-0252/14/2/s07
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