Answers are grounded in this paper and cite their sources.
We demonstrate a process for the fabrication of air-isolated microstructures based upon impurity diffusion disordering and selective etching of multilayer structures. The process is illustrated by the fabrication of 5 and 22 μm wide Bragg reflectors with reflectivities in excess of 95%.
No takes yet. Share an insight, caveat, or question.
Beyler et al. (1991) studied this question.
Synapse has enriched 10 related papers. Consider them for comparative context: