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The solubility and the etching rate (b-face) of TGS crystal in acetone- and ethyl alcohol-water solutions were studied. With the etching knowledge and the photolithographic technique, it is feasible to make TGS pyroelectric detectors of select-etched structure, which is advantageous in processing handling and tooling, together with high detector sensitivity resulting from controllable thinner thickness and better thermal insulation of active area.
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Wang et al. (1983) studied this question.
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