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A novel self-heated Bi-Sb thermocouple for far-infrared detection has been developed. The detector is suitable for integration with monolithic antennas and imaging arrays. The device is fabricated in a single photolithography masking step using a photoresist-bridge technique. This bridge technique has also been used to make microbolometers with lower 1/f noise than those made by two conventional masking steps. The thermocouples have a noise equivalent power (NEP) of 7×10−10 W/(√Hz) and a 3-dB frequency response of 150 kHz.
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Neikirk et al. (1982) studied this question.
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