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August 15, 1986Journal of Applied Physics

Infrared reflectance evaluation of chemically vapor deposited β-SiC films grown on Si substrates

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Authors

RHR. T. HolmUnited States Naval Research LaboratoryPKP. KleinUniversity of GroningenPNP. E. R. NordquistUnited States Naval Research Laboratory

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Holm et al. (1986) studied this question.

synapsesocial.com/papers/6a89404ce0083a7c2c431f87https://doi.org/10.1063/1.337275
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