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September 15, 1985Journal of Applied Physics

Growth of crystalline zirconium dioxide films on silicon

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Authors

MMMizuho MoritaThe University of OsakaHFHirofumi FukumotoNagoya UniversityTITakeshi ImuraHiroshima University

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Morita et al. (1985) studied this question.

synapsesocial.com/papers/6a8951c47fec28afabc112f0https://doi.org/10.1063/1.335912
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