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January 1, 1998Proceedings of the IEEE

Bulk micromachining of silicon

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Authors

GKG.T.A. KovacsSRI InternationalNMN.I. MalufStanford UniversityKPK. PetersenE2S (Belgium)

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Kovacs et al. (1998) studied this question.

synapsesocial.com/papers/6a895ebe40fe6a3effcb02dahttps://doi.org/10.1109/5.704259
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