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RF sputtered BaTiO3 films were found t o change from amorphous to crystalline (tetragonal) depending only on the substrate surface temperature during the d e position. X-ray diffraction indicates that films formed below 700°C surface temperature are amorphous, while above 800°C crystalline films are formed. Dielectric constant, density, energy band-gap and refractive index of the films were measured in b oth the amorphous and crystalline states and were compared t o measurements made on bu lk ceramic and single crystal BaTiO3.
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Olson et al. (1981) studied this question.
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