We present measurements of non-specular X-ray scattering from rough interfaces at a dedicated small-angle scattering beamline that allows for very low divergence of the incident beam and therefore for high resolution close to the specularly reflected beam. A two-dimensional detector is used to measure the non-specular intensity both in and out of the plane of reflection. The method is exemplified by an Au single layer, an amorphous Nb/Al 2 O 3 multilayer and an epitaxial GaAs/AlAs superlattice sample.
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Salditt et al. (1995) studied this question.
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