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May 1, 1982Journal of The Electrochemical SocietyOpen Access

Oxidation‐Induced Point Defects in Silicon

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DAD.A. AntoniadisMassachusetts Institute of Technology

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D.A. Antoniadis (1982) studied this question.

synapsesocial.com/papers/6a897a415246293882fd481fhttps://doi.org/10.1149/1.2124034
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