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March 1, 1980Journal of The Electrochemical SocietyOpen Access

Structure and Properties of LPCVD Silicon Films

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TKT. I. KaminsStanford University

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T. I. Kamins (1980) studied this question.

synapsesocial.com/papers/6a897ac2de654513746220f0https://doi.org/10.1149/1.2129733
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