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A method for the numerical solution of integr-differential equations governing the parameters of ion implantation and energy deposition distributions is described. The influence of the choice of elastic scattering cross-section approximation on the results of damage and ionization distribution calculations is shown. A comparison with some experimental data and Brice's calculations is carried out. The applicability of the Pearson IV distribution function for the construction of the damage profiles is demonstrated.
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Burenkov et al. (1983) studied this question.
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