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February 1, 1971Radiation Effects

The dependence of sputtering efficiency on ion energy and angle of incidence

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HAH. H. AndersenAarhus University

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H. H. Andersen (1971) studied this question.

synapsesocial.com/papers/6a89aa7a176d2ac34cfbaf87https://doi.org/10.1080/00337577108230986
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