An Anodic porous alumina mask with a checkerboard pattern was by forming of square cells and subsequently opening the bottom part of the cells by etching. The anodization of Al with a pretextured pattern, which was formed by imprinting using a mold with alternating defects in the array of convexes in a square lattice, and selective etching of the cells at the deficiency sites generated the alumina mask with the checkerboard pattern. The obtained alumina mask could be applied to the formation of a metal (Au) dot array with a checkerboard pattern by vacuum deposition.
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Harada et al. (2010) studied this question.
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