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August 15, 1984Applied Physics Letters

Fabrication of 20-nm structures in GaAs

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Authors

MSM. B. SternRochester Institute of TechnologyHCH. G. CraigheadCornell UniversityPLP. F. LiaoAlcatel Lucent (Germany)

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Stern et al. (1984) studied this question.

synapsesocial.com/papers/6a89d0152b29b1e07b92d4c4https://doi.org/10.1063/1.95239
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