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Oxidation-induced stacking faults (OSF) have been observed quasi-nondestructively by photoacoustic topography. Photoacoustic (PA) signals were detected with a ZnO transducer made by sputtering on the back surface of a sample. We found a good correlation between the PA topograph and the distribution of OSF. The spatial resolution was about 60 µm in the present PA topography.
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Nakamura et al. (1984) studied this question.
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