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September 1, 1994Japanese Journal of Applied Physics

Step Coverage and Electrical Properties of (Ba, Sr)TiO3 Films Prepared by Liquid Source Chemical Vapor Deposition Using TiO(DPM)2

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Authors

TKTakaaki KawaharaRenesas Electronics (Japan)MYMikio YamamukaMitsubishi Electric (Germany)TMTetsuro MakitaMitsubishi Electric (Japan)

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Cite This Study

Kawahara et al. (1994) studied this question.

synapsesocial.com/papers/6a8a571f6fc170cbc2fbe3f7https://doi.org/10.1143/jjap.33.5129
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