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May 1, 2001IEEE Electron Device Letters

Analog characteristics of metal-insulator-metal capacitors using PECVD nitride dielectrics

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JBJ.A. BabcockTexas Instruments (United States)SBS. BalsterTexas Instruments (United States)APA. PintoInstituto Federal de Educação Ciência e Tecnologia da Paraíba

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Babcock et al. (2001) studied this question.

synapsesocial.com/papers/6a8a907f4de818ad79d45bb2https://doi.org/10.1109/55.919238
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