Thermal Analysis of Target Surface in the Ba-Y-Cu-O Film Preparation by Laser Ablation Method

For clarifying the mechanism of material removal from the surface of Ba-Y-Cu-O by a high-intensity pulsed laser beam, a transient temperature distribution was calculated, and the obtained results were compared with the experimental ones. The calculated values well explain the experimental results such as a threshold of the Ba-Y-Cu-O evaporation. It was found that the subsurface temperature exceeds the front surface temperature. Under such conditions, an explosive removal of material can occur resulting in very rapid material removal with no compositional deviation between the target and the deposited film.