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January 1, 1983Applied Physics Letters

Photon enhanced oxidation of silicon

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Authors

EYE. M. YoungMIT Lincoln LaboratoryWTWilliam A. TillerFord Foundation

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Young et al. (1983) studied this question.

synapsesocial.com/papers/6a8ab7dbe7982ec3bdde937chttps://doi.org/10.1063/1.93726
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