High temperature superconductor, YBa2Cu3O7−δ (YBCO), and ferroelectric, Ba0.1Sr0.9TiO3 (BST), multilayer thin films were deposited on MgO (100) substrates using a pulsed laser deposition. The thin films exhibited only (00l) peaks of YBCO and BST. The HTS thin films demonstrated excellent zero resistance temperature of 92.5 K. We designed and fabricated HTS ferroelectric phase shifter using high frequency system simulator and standard photolithography method, respectively. The YBCO/BST phase shifter shows a low insertion loss (2.97 dB) and large phase change (162°) with dc bias of 40 V at operating frequency of 10 GHz. The HTS ferroelectric phase shifter shows 54 of figure of merit. These results can be applicable to phased array antenna system for satellite communication services.
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Kwak et al. (2005) studied this question.
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