Suppression of corner effects in triple-gate MOSFETs

The abnormal corner effects on channel current in nanoscale triple-gate MOSFETs are examined via two-dimensional (2-D) numerical simulations and quasi-2-D analysis. Heavy body doping [for threshold voltage (V/sub t/) control with a polysilicon gate] is found to underlie the effects, which can hence be suppressed, irrespective of the shape of the corners, by leaving the body undoped, and relying on a metal gate with proper work function for V/sub t/ control. Short-channel effects tend to ameliorate the corner effects, but the need for ad hoc suppression remains.