Suppression of Within-Device Variability in Intrinsic Channel Tri-Gate Silicon Nanowire Metal–Oxide–Semiconductor Field-Effect Transistors

In this paper, the variabilities of threshold voltage ( V TH ), drain-induced barrier lowering (DIBL), and current onset voltage (COV) in intrinsic channel silicon nanowire metal–oxide–semiconductor field-effect transistors (MOSFETs) were evaluated and compared with those of conventional bulk and fully depleted (FD) silicon-on-insulator (SOI) MOSFETs. The random component of variability is extracted by a "within-device" variability method to exclude the systematic component. It is found that the within-device variabilities of DIBL and COV as well as V TH are extremely small in intrinsic channel nanowire MOSFETs owing to the non-intentionally doped channel and small gate workfunction variability. The intrinsic channel nanowire MOSFET is promising for a future scaled device structure in terms of not only the short channel effect suppression but also the variability suppression.