EELS quantification near the single-atom detection level

Parallel-detection electron energy loss spectrometers are able to detect the EELS signal originating from only a few atoms on thin substrates. The instrumental requirements for attaining this level of performance, and the methodology for quantifying the results are described. For the case of small thorium clusters on a thin carbon film, the detection limit with currently available instrumenta- tion is shown to be one atom.