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October 1, 1989Japanese Journal of Applied PhysicsOpen Access

Performance of a Focused-Ion-Beam Implanter with Tilt-Writing Function

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Authors

HSH. SawaragiJEOL (Japan)HMHironobu ManabeJEOL (Japan)HKH. KasaharaOsaka City University

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Sawaragi et al. (1989) studied this question.

synapsesocial.com/papers/6a8bca3e06ce16d944b1fc0ahttps://doi.org/10.1143/jjap.28.2095
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