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A new technique for inhibiting the build‐up of surface charge on electrically non‐conducting samples in secondary‐ion mass spectrometry (SIMS) when using a negative‐ion or neutral primary beam is described. The technique, which involves alternately extracting positive and negative particles from the sample by rapidly reversing the polarity of the secondary‐ion extraction voltage, is non‐intrusive and applicable to all materials. A static SIMS instrument utilizing a negative‐ion and neutral molecular primary beam has been modified to demonstrate the technique.
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Appelhans et al. (1989) studied this question.
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