The application of grazing incidence X-ray reflectivity measurements to the characterization of metallic multilayers is described. Use of simulation permits interface roughness to be determined to a precision of about 0.1 nm r.m.s. (root mean square) from the specular reflectivity profile. Measurement of the diffuse scatter permits interdiffusion to be distinguished in principle from interface roughness. Localization of strong diffuse scatter around the Bragg peaks of superlattices provides evidence for coherency in the roughness through the superlattice thickness.>
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Tanner et al. (1992) studied this question.
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