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March 1, 1981Japanese Journal of Applied Physics

Aluminum Nitride Epitaxially Grown on Silicon: Orientation Relationships

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Authors

MMMizuho MoritaThe University of OsakaSISeiji IsogaiTohoku UniversityNSN. Shimizu

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Morita et al. (1981) studied this question.

synapsesocial.com/papers/6a8c2c18c12eaf65c8b235eehttps://doi.org/10.1143/jjap.20.l173
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  1. 1Reactive molecular beam epitaxy of aluminium nitride1979 · 197 citations
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  4. 4The Use of Metalorganics in the Preparation of Semiconductor Materials1971 · 302 citations