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January 1, 1981Japanese Journal of Applied PhysicsOpen Access

Epitaxial Growth of Aluminum Nitride on Sapphire Using Metalorganic Chemical Vapor Deposition

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MMMizuho MoritaThe University of OsakaNUNorihiko UesugiTohoku UniversitySISeiji IsogaiTohoku University

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Morita et al. (1981) studied this question.

synapsesocial.com/papers/6a8c2c18c12eaf65c8b235f0https://doi.org/10.1143/jjap.20.17
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