The chemistry and physics pertinent to the various steps of MOD processing are discussed, and areas where more basic research is needed are pointed out. The preparation and properties of MOD films of PbTiO3, BaTiO3, Pb(Zr,Ti)O3, (Pb,Sr)TiO3 and (Pb,La)(Zr,Ti)O3 are discussed.
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R. W. Vest (1990) studied this question.
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