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The second-harmonic generation (SHG) from silicon nanocrystallites in polycrystalline films prepared by low-temperature plasma-enhanced chemical-vapor deposition has been studied. We observed an increase in the SHG signal due to the quantum-size effect and shape distortion by decrease in the sizes of crystallites. It was shown that the resonant SHG spectra have a size-dependent fine structure. Also, the power dependence of the SHG response from polycrystalline silicon films was investigated.
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Milovzorov et al. (1999) studied this question.
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