High frequency electrical circuits on a planar lightwave circuit platform

We investigated the propagation losses and the characteristic impedances Z/sub L/ of coplanar waveguides (CPWs) and microstrip lines (MSLs) on a planar lightwave circuit (PLC)-platform formed on a silica/silicon substrate. The loss of the CPWs was 2.7 dB/cm at 10 GHz on the PLC-platform with 30 /spl mu/m thick silica layer. Thus, a cm-order circuit of this CPW is difficult to fabricate in the 10 Gb/s module. This is because the silicon substrate has a large loss tangent (tan /spl delta/). On the other hand, the loss of the MSLs, where a ground plane shielded the high loss silicon substrate, could be improved to 0.9 dB/cm at 10 GHz with 30 /spl mu/m thick polyimide. These lower loss MSLs on a PLC-platform can be applied to module operation at 10 Gb/s. Furthermore they have the advantage that they are suitable for application to array device circuits or circuits in a module where several devices are integrated because unlike CPWs the ground planes are not divided by signal lines or DC bias lines. The structure of CPWs and MSLs on a PLC-platform with a Z/sub L/ of 50 /spl Omega/ was also studied in detail.