Enhancement of Tracking Ability in Piezoceramic Actuators Subject to Dynamic Excitation Conditions

An operator representing the inverse dynamics of hysteretic effects inherent to piezoceramic actuators is used to enhance the tracking accuracy of a piezoceramic-driven positioning system when subject to dynamic reference input signals covering a wide frequency range. An open-loop tracking controller and a closed-loop tracking controller are developed based on the new inverse algorithm and are experimentally shown to achieve high-accuracy tracking control.