High quality YBa/sub 2/Cu/sub 3/O/sub 7- delta / thin films have been fabricated by pulsed Nd:YAG laser deposition using an unusual off-axis target-substrate geometry. In this geometry, one can eliminate the deposition of laser droplets. The films are free of particles and have smooth surfaces. The critical temperature (T/sub c/) of these films is in the range of 87-90 K, which is as high as that of on-axis deposited films. From the X-ray rocking curve measurement and the magnetization measurement, no significant differences were found between the on-axis and off-axis laser deposited films.>
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Koga et al. (1993) studied this question.
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