Systematic Study of Insulator Deposition Effect (Si3N4, SiO2, AlN, and Al2O3) on Electrical Properties in AlGaN/GaN Heterostructures, Maeda, Narihiko, Hiroki, Masanobu, Watanabe, Noriyuki, Oda, Yasuhiro, Yokoyama, Haruki, Yagi, Takuma, Makimoto, Toshiki, Enoki, Takatomo, Kobayashi, Takashi
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Maeda et al. (2007) studied this question.
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