Kinetics of the reduction of silicon tetrachloride and trichlorosilane by hydrogen

Reaction products from SiCl4/H2 and SiHCl3/H2 mixtures have been examined over the temperature range 800–1200°K, and the conditions under which equilibrium is reached have been established. The results point to a ΔH° for SiCl4 of between −162 and −163 kcal/mole. The reaction rates expressed in mole/1/sec were: d[SiHCl3]/dt = 7.8 × 1010 [SiCl4] [H2]1/2 exp −55,000/RT and d[SiH2Cl3]/dt = 2.0 × 1010 [SiHCl3] exp −51,000/RT and kinetic mechanisms have been suggested.