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January 1, 2015Chemical Communications

Fabrication of high-quality amorphous silicon film from cyclopentasilane by vapor deposition between two parallel substrates

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Authors

ZSZhongrong ShenFujian Normal UniversityTMTakashi MasudaNational Archives and Records AdministrationHTHideyuki TakagishiJapan Advanced Institute of Science and Technology

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Shen et al. (2015) studied this question.

synapsesocial.com/papers/6a902c0cfdb099d0d8dd78abhttps://doi.org/10.1039/c4cc09026h
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