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November 23, 1992Applied Physics Letters

Low pressure metalorganic chemical vapor deposition of AIN over sapphire substrates

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Authors

MKM. Asif KhanAbdul Wali Khan University MardanJKJ. N. KuzniaOmega Optics (United States)RSR. A. SkogmanHoneywell (United States)

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Khan et al. (1992) studied this question.

synapsesocial.com/papers/6a903697f009383eee841436https://doi.org/10.1063/1.108144
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