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July 1, 1998Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Kinetic energy distribution of nitrogen ions in an electron cyclotron resonance plasma

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ZFZhaoyang FanWeifang Medical UniversityNNN. NewmanArizona State University

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Fan et al. (1998) studied this question.

synapsesocial.com/papers/6a903810bcd42327600d2badhttps://doi.org/10.1116/1.581320
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