Ultrasonic measurements of surface roughness

This is the authors' abstract. We don't add key points for this paper.

Pulsed ultrasound propagating in water was used at megahertz carrier frequencies (nominally 10-50MHz) to reflect and scatter from rough surfaces in the same way as light. We have considered noncontact ultrasonic techniques as complementary to optical techniques in several ways: (a) for specificapplications such as wet surfaces, (b) for rougher surfaces with average roughness, R(a) ≥ 0.1 µm, and (c) for (simultaneous) profilometry by time-of-flight measurements. Stylus and ultrasonic data are compared. An example of application to the manufacturing environment is for on-line, real-time sensor feedback and process control in the cutting or grinding of metals and ceramics.