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September 1, 1990Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Ion energetics in electron cyclotron resonance discharges

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WHW. M. HolberQuality and Reliability (Greece)JFJohn ForsterIBM (United States)

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Holber et al. (1990) studied this question.

synapsesocial.com/papers/6a9068bfe8d327d500342d37https://doi.org/10.1116/1.576485
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