We demonstrate a simple way of increasing the data acquisition and processing speed in a scanning white-light interferometer for surface topography measurement. The method consists of undersampling interference data and processing the resultant sub-Nyquist interferograms in the frequency domain to create complete three-dimensional images. Experimental results on a 20-μm step height standard show a measurement repeatability of 10 nm.
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Groot et al. (1993) studied this question.
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